A novel on-axis self-calibration approach for precision rotary metrology stages - researchr publication authors

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Chuxiong Hu, Yu Zhu, Jinchun Hu, Dengfeng Xu, Ming Zhang. A novel on-axis self-calibration approach for precision rotary metrology stages. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 1072-1077, IEEE, 2013. [doi]

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