A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error

Chuxiong Hu, Yu Zhu, Jinchun Hu, Dengfeng Xu, Ming Zhang. A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error. IEEE T. Instrumentation and Measurement, 62(2):483-494, 2013. [doi]

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