A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error

Chuxiong Hu, Yu Zhu, Jinchun Hu, Dengfeng Xu, Ming Zhang. A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error. IEEE T. Instrumentation and Measurement, 62(2):483-494, 2013. [doi]

Abstract

Abstract is missing.