Gangshi Hu, Xinyu Zhang, G. Orkoulas, Panagiotis D. Christofides. Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process. In Proceedings of the 48th IEEE Conference on Decision and Control, CDC 2009, combined withe the 28th Chinese Control Conference, December 16-18, 2009, Shanghai, China. pages 2387-2394, IEEE, 2009. [doi]
Abstract is missing.