Zhishan Hua, Onnop Srivannavit, Yongmei Xia, Erdogan Gulari. A Compact Chemical-Resistant Microvalve Array Using Parylene Membrane and Pneumatic Actuation. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 72-76, IEEE Computer Society, 2004. [doi]
Abstract is missing.