Ching-Pei Huang, Rongshun Chen. Integration and implementation of CMOS-MEMS accelerometer and capacitive sensing circuits. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 543-546, IEEE, 2011. [doi]
Abstract is missing.