Mao-Jung Huang, Nien-Nan Chu, Chun-Ming Chang, Ming-Hua Shiao, Chien-Nan Hsiao. Development of catalytic etching using dual materials. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 551-554, IEEE, 2014. [doi]
@inproceedings{HuangCCSH14,
title = {Development of catalytic etching using dual materials},
author = {Mao-Jung Huang and Nien-Nan Chu and Chun-Ming Chang and Ming-Hua Shiao and Chien-Nan Hsiao},
year = {2014},
doi = {10.1109/NEMS.2014.6908872},
url = {https://doi.org/10.1109/NEMS.2014.6908872},
researchr = {https://researchr.org/publication/HuangCCSH14},
cites = {0},
citedby = {0},
pages = {551-554},
booktitle = {9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
publisher = {IEEE},
isbn = {978-1-4799-4726-3},
}