Development of catalytic etching using dual materials

Mao-Jung Huang, Nien-Nan Chu, Chun-Ming Chang, Ming-Hua Shiao, Chien-Nan Hsiao. Development of catalytic etching using dual materials. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 551-554, IEEE, 2014. [doi]

Abstract

Abstract is missing.