Development of composite vertical wet etching for silicon material - researchr publication authors

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Mao-Jung Huang, Chun-Ming Chang, Nien-Nan Chu, Yu-Hsiang Tang, Chii-Rong Yang. Development of composite vertical wet etching for silicon material. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 564-567, IEEE, 2014. [doi]

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