Mao-Jung Huang, Chun-Ming Chang, Nien-Nan Chu, Yu-Hsiang Tang, Chii-Rong Yang. Development of composite vertical wet etching for silicon material. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 564-567, IEEE, 2014. [doi]
@inproceedings{HuangCCTY14,
title = {Development of composite vertical wet etching for silicon material},
author = {Mao-Jung Huang and Chun-Ming Chang and Nien-Nan Chu and Yu-Hsiang Tang and Chii-Rong Yang},
year = {2014},
doi = {10.1109/NEMS.2014.6908875},
url = {https://doi.org/10.1109/NEMS.2014.6908875},
researchr = {https://researchr.org/publication/HuangCCTY14},
cites = {0},
citedby = {0},
pages = {564-567},
booktitle = {9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
publisher = {IEEE},
isbn = {978-1-4799-4726-3},
}