Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

Chien-Hsin Huang, Chien-Hsing Lee, Tsung-Min Hsieh, Li-Chi Tsao, Shaoyi Wu, Jhyy-Cheng Liou, Ming-Yi Wang, Li-Che Chen, Ming-Chuen Yip, Weileun Fang. Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate. Sensors, 11(6):6257-6269, 2011. [doi]

Authors

Chien-Hsin Huang

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Chien-Hsing Lee

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Tsung-Min Hsieh

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Li-Chi Tsao

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Shaoyi Wu

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Jhyy-Cheng Liou

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Ming-Yi Wang

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Li-Che Chen

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Ming-Chuen Yip

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Weileun Fang

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