Chien-Hsin Huang, Chien-Hsing Lee, Tsung-Min Hsieh, Li-Chi Tsao, Shaoyi Wu, Jhyy-Cheng Liou, Ming-Yi Wang, Li-Che Chen, Ming-Chuen Yip, Weileun Fang. Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate. Sensors, 11(6):6257-6269, 2011. [doi]
Abstract is missing.