Kuo-Feng Huang, Sung-Wen Tsai, Yung-Chun Lee. Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 31-35, IEEE, 2012. [doi]
@inproceedings{HuangTL12-2,
title = {Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography},
author = {Kuo-Feng Huang and Sung-Wen Tsai and Yung-Chun Lee},
year = {2012},
doi = {10.1109/NEMS.2012.6196716},
url = {http://dx.doi.org/10.1109/NEMS.2012.6196716},
researchr = {https://researchr.org/publication/HuangTL12-2},
cites = {0},
citedby = {0},
pages = {31-35},
booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
publisher = {IEEE},
isbn = {978-1-4673-1122-9},
}