Design of Processing Chamber Based on the Flow Uniformity

Zun-di Huang, Tie-niu Yang, Chang-ming Li, Hui Huang, Qi-li Zhang, Shu-guang Hou. Design of Processing Chamber Based on the Flow Uniformity. In Erhard Plödereder, Lars Grunske, Eric Schneider, Dominik Ull, editors, 44. Jahrestagung der Gesellschaft für Informatik, Informatik 2014, Big Data - Komplexität meistern, 22.-26. September 2014 in Stuttgart, Deutschland. Volume 232 of LNI, pages 2037-2042, GI, 2014.

Abstract

Abstract is missing.