Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage

Weicai Huang, Kaiming Yang, Yu Zhu, Xin Li 0058, Haihua Mu, Min Li 0016. Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage. J. Systems & Control Engineering, 234(6), 2020. [doi]

@article{HuangYZLML20,
  title = {Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage},
  author = {Weicai Huang and Kaiming Yang and Yu Zhu and Xin Li 0058 and Haihua Mu and Min Li 0016},
  year = {2020},
  doi = {10.1177/0959651819874563},
  url = {https://doi.org/10.1177/0959651819874563},
  researchr = {https://researchr.org/publication/HuangYZLML20},
  cites = {0},
  citedby = {0},
  journal = {J. Systems & Control Engineering},
  volume = {234},
  number = {6},
}