LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage

Tao Huang, Kaiming Yang, Yu Zhu, Qian Tang, Min Cheng, Yi Wang 0043. LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage. IEEE Transactions on Industrial Electronics, 66(11):8567-8577, 2019. [doi]

@article{HuangYZTCW19,
  title = {LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage},
  author = {Tao Huang and Kaiming Yang and Yu Zhu and Qian Tang and Min Cheng and Yi Wang 0043},
  year = {2019},
  doi = {10.1109/TIE.2019.2903779},
  url = {https://doi.org/10.1109/TIE.2019.2903779},
  researchr = {https://researchr.org/publication/HuangYZTCW19},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Industrial Electronics},
  volume = {66},
  number = {11},
  pages = {8567-8577},
}