Mimi Huang, Libo Zhao, Tingzhong Xu, Chen Jia, Ping Yang, Zhikang Li, Hongyan Wang, Yongshun Wu, Zhuangde Jiang. A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020, San Diego, CA, USA, September 27-30, 2020. pages 167-170, IEEE, 2020. [doi]
Abstract is missing.