Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Randall A. Hughes, John D. Shott. The future of automation for high-volume Wafer fabrication and ASIC manufacturing. Proceedings of the IEEE, 74(12):1775-1793, 1986. [doi]