Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Min-Hsiung Hung, Kuan-Yii Chen, Rui-Wen Ho, Fan-Tien Cheng. Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations. AI in Engineering, 17(3-4):165-178, 2003. [doi]

Authors

Min-Hsiung Hung

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Kuan-Yii Chen

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Rui-Wen Ho

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Fan-Tien Cheng

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