Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Min-Hsiung Hung, Kuan-Yii Chen, Rui-Wen Ho, Fan-Tien Cheng. Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations. AI in Engineering, 17(3-4):165-178, 2003. [doi]

Abstract

Abstract is missing.