Min-Hsiung Hung, Hsien-Cheng Huang, Haw Ching Yang, Fan-Tien Cheng. Development of an automatic virtual metrology framework for TFT-LCD industry. In IEEE Conference on Automation Science and Engineering, CASE 2010, Toronto, ON, Canada, 21-24 August, 2010. pages 879-884, IEEE, 2010. [doi]
Abstract is missing.