Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism

J. Iannacci, A. Repchankova, A. Faes, Augusto Tazzoli, Gaudenzio Meneghesso, Gian-Franco Dalla Betta. Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism. Microelectronics Reliability, 50(9-11):1599-1603, 2010. [doi]

@article{IannacciRFTMB10,
  title = {Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism},
  author = {J. Iannacci and A. Repchankova and A. Faes and Augusto Tazzoli and Gaudenzio Meneghesso and Gian-Franco Dalla Betta},
  year = {2010},
  doi = {10.1016/j.microrel.2010.07.108},
  url = {http://dx.doi.org/10.1016/j.microrel.2010.07.108},
  tags = {rule-based, reliability},
  researchr = {https://researchr.org/publication/IannacciRFTMB10},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {50},
  number = {9-11},
  pages = {1599-1603},
}