Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism

J. Iannacci, A. Repchankova, A. Faes, Augusto Tazzoli, Gaudenzio Meneghesso, Gian-Franco Dalla Betta. Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism. Microelectronics Reliability, 50(9-11):1599-1603, 2010. [doi]

Abstract

Abstract is missing.