A Digital ULSI Inspection Method Using Parallel Scanning Confocal Microscope

Yoshiharu Ichikawa, Jun-ichiro Toriwaki. A Digital ULSI Inspection Method Using Parallel Scanning Confocal Microscope. In Proceedings of IAPR Workshop on Machine Vision Applications, MVA 1994, December 13-15, 1994, Kawasaki, Japan. pages 568-570, 1994. [doi]

Abstract

Abstract is missing.