Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics

Takuji Ikemoto, Yasuo Kokubun. Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics. IEICE Transactions, 90-C(1):78-86, 2007. [doi]

Abstract

Abstract is missing.