Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa. Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications. Microelectronics Reliability, 53(9-11):1381-1386, 2013. [doi]
@article{IlgunsatirogluIC13,
title = {Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications},
author = {Emre Ilgünsatiroglu and Alexey Yu. Illarionov and Mauro Ciappa},
year = {2013},
doi = {10.1016/j.microrel.2013.07.131},
url = {http://dx.doi.org/10.1016/j.microrel.2013.07.131},
researchr = {https://researchr.org/publication/IlgunsatirogluIC13},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {53},
number = {9-11},
pages = {1381-1386},
}