A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors

Ryoichi Ishihara, Arie Glazer, Yoel Raab, Peter Rusian, Mannie Dorfan, Benzi Lavi, Ilya Leizerson, Albert Kishinevsky, Yvonne Van Andel, Xin Cao, Wim Metselaar, Kees Beenakker, Sara Stolyarova, Yael Nemirovsky. A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors. IEICE Transactions, 89-C(10):1377-1382, 2006. [doi]

Abstract

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