Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point

Haruki Ishinabe, Takeshi Kobayashi, Dong F. Wang, Toshihiro Itoh, Ryutaro Maeda. Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 615-618, IEEE, 2012. [doi]

Abstract

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