A Thresholding Approach for Segmenting Deteriorated SEM Images in an Automated X-ray Mask Visual Inspection System

Minoru Ito. A Thresholding Approach for Segmenting Deteriorated SEM Images in an Automated X-ray Mask Visual Inspection System. In Proceedings of IAPR Workshop on Machine Vision Applications, MVA 1994, December 13-15, 1994, Kawasaki, Japan. pages 478-481, 1994. [doi]

Abstract

Abstract is missing.