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Feedback controller design considering plant dynamics of table drive system in microscopic displacement region

Kazuaki Ito, Yuichi Katsuki, Wataru Maebashi, Makoto Iwasaki. Feedback controller design considering plant dynamics of table drive system in microscopic displacement region. In 12th IEEE International Workshop on Advanced Motion Control, AMC 2012, Sarajevo, Bosnia and Herzegovina, March 25-27, 2012. pages 1-5, IEEE, 2012. [doi]

Authors

Kazuaki Ito

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Yuichi Katsuki

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Wataru Maebashi

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Makoto Iwasaki

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