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Development of Microfabrication Technology with Maskless Photolithography Device Using LCD Projector

Kazuyoshi Itoga, Jun Kobayashi, Masayuki Yamato, Teruo Okano. Development of Microfabrication Technology with Maskless Photolithography Device Using LCD Projector. JRM, 22(5):608-612, 2010. [doi]

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Kazuyoshi Itoga

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Jun Kobayashi

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Masayuki Yamato

This author has not been identified. Look up 'Masayuki Yamato' in Google

Teruo Okano

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