Kazuyoshi Itoga, Jun Kobayashi, Masayuki Yamato, Teruo Okano. Development of Microfabrication Technology with Maskless Photolithography Device Using LCD Projector. JRM, 22(5):608-612, 2010. [doi]
@article{ItogaKYO10,
title = {Development of Microfabrication Technology with Maskless Photolithography Device Using LCD Projector},
author = {Kazuyoshi Itoga and Jun Kobayashi and Masayuki Yamato and Teruo Okano},
year = {2010},
doi = {10.20965/jrm.2010.p0608},
url = {http://dx.doi.org/10.20965/jrm.2010.p0608},
researchr = {https://researchr.org/publication/ItogaKYO10},
cites = {0},
citedby = {0},
journal = {JRM},
volume = {22},
number = {5},
pages = {608-612},
}