Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

Kenneth M. Jabon, Christopher V. Poulton, Ren-Jye Shiue, Matthew J. Byrd, Zhan Su 0001, Mohammad H. Teimourpour, Scott Breitenstein, Ronald P. Millman, Dogan A. Atlas, Michael R. Watts, Erman Timurdogan. Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers. In Optical Fiber Communications Conference and Exhibition, OFC 2021, San Francisco, CA, USA, June 6-10, 2021. pages 1-3, IEEE, 2021. [doi]

@inproceedings{JabonPSB0TBMAWT21,
  title = {Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers},
  author = {Kenneth M. Jabon and Christopher V. Poulton and Ren-Jye Shiue and Matthew J. Byrd and Zhan Su 0001 and Mohammad H. Teimourpour and Scott Breitenstein and Ronald P. Millman and Dogan A. Atlas and Michael R. Watts and Erman Timurdogan},
  year = {2021},
  url = {https://ieeexplore.ieee.org/document/9489584},
  researchr = {https://researchr.org/publication/JabonPSB0TBMAWT21},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {Optical Fiber Communications Conference and Exhibition, OFC 2021, San Francisco, CA, USA, June 6-10, 2021},
  publisher = {IEEE},
  isbn = {978-1-943580-86-6},
}