Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

Kenneth M. Jabon, Christopher V. Poulton, Ren-Jye Shiue, Matthew J. Byrd, Zhan Su 0001, Mohammad H. Teimourpour, Scott Breitenstein, Ronald P. Millman, Dogan A. Atlas, Michael R. Watts, Erman Timurdogan. Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers. In Optical Fiber Communications Conference and Exhibition, OFC 2021, San Francisco, CA, USA, June 6-10, 2021. pages 1-3, IEEE, 2021. [doi]

Abstract

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