Marco Jähnisch, Helge Hülsen, Torsten Sievers, Sergej Fatikow. Control System of a Nanohandling Cell within a Scanning Electron Microscope. In Intelligent Control, 2005. Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation, Limassol, Cyprus, 27-29 June, 2005. pages 964-969, IEEE, 2005. [doi]
@inproceedings{JahnischHSF05,
title = {Control System of a Nanohandling Cell within a Scanning Electron Microscope},
author = {Marco Jähnisch and Helge Hülsen and Torsten Sievers and Sergej Fatikow},
year = {2005},
doi = {10.1109/.2005.1467144},
url = {https://doi.org/10.1109/.2005.1467144},
researchr = {https://researchr.org/publication/JahnischHSF05},
cites = {0},
citedby = {0},
pages = {964-969},
booktitle = {Intelligent Control, 2005. Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation, Limassol, Cyprus, 27-29 June, 2005},
publisher = {IEEE},
isbn = {0-7803-8936-0},
}