Marco Jähnisch, Helge Hülsen, Torsten Sievers, Sergej Fatikow. Control System of a Nanohandling Cell within a Scanning Electron Microscope. In Intelligent Control, 2005. Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation, Limassol, Cyprus, 27-29 June, 2005. pages 964-969, IEEE, 2005. [doi]
Abstract is missing.