Mohammad Tariq Jan, Farooq Ahmad, Nor Hisham Hamid, Mohd Haris M. Khir, Khalid Ashraf, Muhammad Shoaib. Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach. Microelectronics Reliability, 57:64-70, 2016. [doi]
@article{JanAHKAS16,
title = {Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach},
author = {Mohammad Tariq Jan and Farooq Ahmad and Nor Hisham Hamid and Mohd Haris M. Khir and Khalid Ashraf and Muhammad Shoaib},
year = {2016},
doi = {10.1016/j.microrel.2015.12.003},
url = {http://dx.doi.org/10.1016/j.microrel.2015.12.003},
researchr = {https://researchr.org/publication/JanAHKAS16},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {57},
pages = {64-70},
}