Instrumentation for the 3D measurement of circular disks and the quantification of warpage

Marian Janko, Paul O'Leary, Matthew Harker. Instrumentation for the 3D measurement of circular disks and the quantification of warpage. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2013, Minneapolis, MN, USA, May 6-9, 2013. pages 146-150, IEEE, 2013. [doi]

Abstract

Abstract is missing.