Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

Juan Jaramillo, Artur Zarzycki, July Galeano Zea, Patrick Sandoz. Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography. Sensors, 17(2):278, 2017. [doi]

Authors

Juan Jaramillo

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Artur Zarzycki

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July Galeano Zea

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Patrick Sandoz

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