Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

Juan Jaramillo, Artur Zarzycki, July Galeano Zea, Patrick Sandoz. Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography. Sensors, 17(2):278, 2017. [doi]

@article{JaramilloZZS17,
  title = {Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography},
  author = {Juan Jaramillo and Artur Zarzycki and July Galeano Zea and Patrick Sandoz},
  year = {2017},
  doi = {10.3390/s17020278},
  url = {http://dx.doi.org/10.3390/s17020278},
  researchr = {https://researchr.org/publication/JaramilloZZS17},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {17},
  number = {2},
  pages = {278},
}