A simplified modeling approach for a MEMS capacitive sensor

Syed Arsalan Jawed, Davide Cattin, Nicola Massari, Massimo Gottardi, Benno Margesin, Andrea Baschirotto. A simplified modeling approach for a MEMS capacitive sensor. In 18th European Conference on Circuit Theory and Design, ECCTD 2007, Seville, Spain, August 26-30, 2007. pages 112-115, IEEE, 2007. [doi]

@inproceedings{JawedCMGMB07,
  title = {A simplified modeling approach for a MEMS capacitive sensor},
  author = {Syed Arsalan Jawed and Davide Cattin and Nicola Massari and Massimo Gottardi and Benno Margesin and Andrea Baschirotto},
  year = {2007},
  doi = {10.1109/ECCTD.2007.4529549},
  url = {https://doi.org/10.1109/ECCTD.2007.4529549},
  researchr = {https://researchr.org/publication/JawedCMGMB07},
  cites = {0},
  citedby = {0},
  pages = {112-115},
  booktitle = {18th European Conference on Circuit Theory and Design, ECCTD 2007, Seville, Spain, August 26-30, 2007},
  publisher = {IEEE},
  isbn = {978-1-4244-1341-6},
}