Syed Arsalan Jawed, Davide Cattin, Nicola Massari, Massimo Gottardi, Benno Margesin, Andrea Baschirotto. A simplified modeling approach for a MEMS capacitive sensor. In 18th European Conference on Circuit Theory and Design, ECCTD 2007, Seville, Spain, August 26-30, 2007. pages 112-115, IEEE, 2007. [doi]
Abstract is missing.