MuDer Jeng, Xiaolan Xie. Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded Behaviors Using Petri Nets and Siphons. In Proceedings of the 2001 IEEE International Conference on Robotics and Automation, ICRA 2001, May 21-26, 2001, Seoul, Korea. pages 52-57, IEEE, 2001.
Abstract is missing.