MuDer Jeng, Xiaolan Xie. Qualitative analysis and deadlock prevention of a real-world IC wafer fabrication system. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, SMC 1998, Hyatt Regency La Jolla, San Diego, California, USA, October 11-14,1998. pages 475-480, IEEE, 1998. [doi]
Abstract is missing.