MuDer Jeng, Xiaolan Xie. Modeling and analysis using Petri nets for semiconductor fabrication. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, SMC 1998, Hyatt Regency La Jolla, San Diego, California, USA, October 11-14,1998. pages 692-697, IEEE, 1998. [doi]
Abstract is missing.