MuDer Jeng, Xiaolan Xie, Sheng-Luen Chung. ERCN merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems. In Proceedings of the 2003 IEEE International Conference on Robotics and Automation, ICRA 2003, September 14-19, 2003, Taipei, Taiwan. pages 1033-1038, IEEE, 2003.
Abstract is missing.