ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems

MuDer Jeng, Xiaolan Xie, Sheng-Luen Chung. ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 34(1):102-112, 2004. [doi]

@article{JengXC04,
  title = {ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems},
  author = {MuDer Jeng and Xiaolan Xie and Sheng-Luen Chung},
  year = {2004},
  doi = {10.1109/TSMCA.2003.820579},
  url = {http://doi.ieeecomputersociety.org/10.1109/TSMCA.2003.820579},
  tags = {modeling, process modeling},
  researchr = {https://researchr.org/publication/JengXC04},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
  volume = {34},
  number = {1},
  pages = {102-112},
}