ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems

MuDer Jeng, Xiaolan Xie, Sheng-Luen Chung. ERCN* merged nets for modeling degraded behavior and parallel processes in semiconductor manufacturing systems. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 34(1):102-112, 2004. [doi]

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