Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry

Deokmin Jeon, Unsang Jung, Kibeom Park, Pilun Kim, Sangyeob Han, Hyosang Jeong, Ruchire Eranga Wijesinghe, Naresh Kumar Ravichandran, Jaeyul Lee, Youngmin Han, Mansik Jeon, Jeehyun Kim. Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry. IEEE Access, 8:190700-190709, 2020. [doi]

Abstract

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