Jun Ho Jeong, Young-suk Sim, Hyonkee Sohn, Eung-sug Lee. UV Nanoimprint Lithography Using an Elementwise Embossed Stamp. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 233-236, IEEE Computer Society, 2004. [doi]
Abstract is missing.